OEM/ODM China Refractory Metal Heating Elements - Metal rotary target – WINNERS

Product Description

An orthogonal magnetic field and electric field are added between the sputtered target  (cathode)  and the anode,  and the required inert  gas

(usually Ar gas)is filled in the high vacuum chamber.Under the action of the electric field, the Ar gas is ionized into positive ions And electrons,

 a  certain  negative high pressure is applied to the target ,  the electrons  emitted  from the target are affected by the magnetic field and  the

ionization probability of the working gas increases ,  forming a high-density plasma near the cathode  ,  and  Ar  ions  are under the action  of

Lorentz force . Accelerate to fly to the target surface , bombard the target surface at a high speed, so that the sputtered atoms on  the  target

follow the momentum conversion principle and fly away from the target surface to the substrate to deposit a film with high kinetic energy.

In order to further improve the utilization rate of the target material, a rotating cathode with higher use efficiency is designed, and a tubular

target material is used for sputtering coating. The improvement of sputtering equipment requires the target to be changed from a flat shape

to a tubular shape  ,  and the utilization rate of the tubular rotating target can be as high as 70%  ,  which  largely solves the problem of low

utilization of the flat target.

Product Parameters

 Note: We mainly produce various metal targets, please consult us for details.

Application

Sputtering coating is a new type of physical vapor coating method. Compared with evaporation coating method, it has obvious advantages
in many aspects. Metal sputtering targets have been used in many fields. The main application of rotating target.

 ● Solar cells

 ● Architectural glass

 ● Auto glass

 ● Semiconductor

 ● Flat-screen TV, etc

Order Information

Inquiries and orders should include the following information 
 ● Target specification ID*OD*L (mm).
 ● Quantity required.
 ● Please contact us for other special needs.